News Article
Providing high dynamical positioning for semiconductors
The new piezosystem jena tool is claimed to prove precise movement in the nanometre range
The 3-axes positioning element, the TRITOR 320 CAP,offered by piezosystem jena, is an actuator for high accuracy positioning.
The TRITOR 320 CAP, pictured above, was developed with use of FEM-technology with the goal of accuracy positioning and the dynamics of large loads. The performance of the TRITOR 320 can be attributed to its construction with flexure hinges, that are free of friction.
Through the use of capacitive sensors the TRITOR 320 CAP achieves good precision, which the manufacturer says is reflected in a high reproducibility and linearity and stability.- especially in applications of the semiconductor industry, surface analysis, mask inspection.
Key-Features:
- Precise and high dynamical movement
- Load up to 200N
- 1 nm resolution in closed-loop
- Motion up to 320 µm
- Possibility of adjustment for vacuum- and low temperature application
- Aperture 150 x 150mm on request
