k-Space releases an Emissivity Corrected Pyrometry (ECP) module
US based k-Space, a manufacturer of in-situ, in-line, and ex-situ metrology tools for the semiconductor, thin-film, and photovoltaic (PV) industries has announced that it has added an Emissivity Corrected Pyrometry (ECP) module for its kSA ICE product line.
The ECP module can be added to new or existing ICE systems.
For applications where using band edge thermometry is not applicable (e.g. small band gap or heavily doped substrates), pyrometry is often used.
However, pyrometry measurements during film growth are often compromised by thin film interference that affects the measured radiation signal. By directly measuring the reflectance of the sample, the changes in surface emissivity can be compensated for, and a more reliable temperature (ECP temperature) is determined.
This functionality is particularly useful for GaN on Si growth, and complements the existing temperature measurement tools manufactured by k-Space.
