Edge bead removal for large, round & non-standard shaped substrates
Removing the edge bead on all edges of round, square and odd shaped (Cleaved) substrates is a challenge for photolithography engineers. solar-semi's "˜smartEBR' system was designed to remove the edge bead on any shaped substrate.
solar-semi's "˜smartEBR' technology was first developed to meet the demand for edge bead removal on large OLED substrates. This patented EBR tool was further refined to meet the needs of round (including flats and notches), square and cleaved substrates. The removal depth is programmable from the edge with high accuracy over the entire edge. It can also remove different patterns in the resist.
"With our "˜smartEBR' technology we are able to process especially large substrates, up to GEN xx. So solar-semi offers the whole process sequences for flat panel processing - coating, baking, etching, stripping and cleaning" stated Mr. Konrad Walter, project manager at solar-semi GmbH.
solar-semi systems are based on standardized platforms which allow for a wide range of individual configurations. Systems are designed for processing and handling of fragile substrates used in the semiconductor, MEMS, piezoMEMS and OLED / LCD display industries. solar-semi platforms, modules and options are designed to cover applications and process needs from basic R&D to high volume production. By selecting standard components and using a modular design, cost and complexity are minimized.
The headquarter of solar-semi GmbH is in Radolfzell Germany (Lake Constance).
