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DCG Introduces Tool for Electrical Fault Analysis

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DCG Systems, Inc has introduced the Meridian DBX electrical fault analysis (EFA) system, featuring a patented infrared optical subsystem with demonstrated ability at 0.4VDD to detect intrinsic leakage on low-voltage, 14/16nm finFET devices required for today's advanced mobile technologies. Developed over four years with cost-share funding from IARPA (Intelligence Advanced Research Projects Activity), and evaluated by a major semiconductor manufacturer, the Meridian DBX demonstrated a 10-fold increase in sensitivity on advanced, low-voltage devices, compared to the industry's most advanced LN2-cooled InGaAs EFA systems.

"Emission microscopy is the classic tool for fault detection in low voltage, low leakage devices, and is a critical need for all advanced IC manufacturers, especially for finFET device manufacturing where Vmin is a major obstacle to ramp yield," said Dr. Israel Niv, Chief Executive Officer of DCG Systems. "Meridian DBX -- which in customer evaluations detected electrical faults in low voltage, low power ICs that were not detected by the most advanced InGaAs-based EFA systems, even under long integration times -- extends the performance of emission microscopy for today's most troublesome electrical faults."

Photoemission intensity decreases exponentially with decreasing device operating voltage, requiring greater detection sensitivity at increasingly longer wavelengths. InGaAs-based EFA systems lose sensitivity beyond 1550nm, and therefore capture only a small portion of the useful emission from the low voltage device under test.

The patented Meridian DBX technology incorporates a new, high-quantum efficiency detector with ultra-low noise electronics and a unique cryogenic design that minimizes detector noise, enabling it to better reject thermal noise. Furthermore, a proprietary cold filter wheel allows the user to tune the system's wavelength detection range, optimizing the infrared emission microscope for specific IC device operating conditions and the best SNR (Signal to Noise Ratio). DCG Systems has received and begun delivering multiple orders for the Meridian DBX system. DBX technology is also available as an upgrade to existing Meridian IV and Meridian WS-DP systems.

 


 

 


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